wuxi lead intelligent equipment co., ltd.-凯发在线

inline tube pecvd loading and unloading machine
description:
the inline tube pecvd loading and unloading machine is to automatically load wafers from wafer box to pecvd quarts boat or unload them from boat to wafer box.
benefits:
1. uph: 6000 pcs/hr;
2. ultra-low damage rate:≤0.03%;
3. reserved pl station to accommodate area scan and line scan aoi cameras;
4. softtouch design concept to reduce silicon damage rate
automatic loading
high capacity
low damage rate
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